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Graphical abstract template · Graphene synthesis · Epitaxial growth on SiC · Bottom-up

Graphene on SiC for remote epitaxy and layer transfer

Epitaxial graphene on SiC can serve as a reusable growth template. A single-crystal GaN film is grown on the graphene, a nickel stressor layer and tape are added, and the film peels off cleanly along the weak graphene interface. It is then placed on any host substrate, while the graphene/SiC wafer goes back for the next growth.

Updated 3 cited papers59 editable layers

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At a glance

Category
Graphene synthesis
Method
Epitaxial growth on SiC
Approach
Bottom-up
Starting materials
Epitaxial graphene on a SiC wafer
Product
A single-crystal GaN film on a host substrate of choice, and a reusable graphene/SiC wafer
Typical size
Wafer-scale films
Key result
Single-crystal GaN with about 4 × 10⁸ cm⁻² defects, released with a smooth surface
Scalability
Medium: wafer-scale, and the costly substrate is reused
Figure
1920 × 1080 px (16:9), 59 editable layers, 13 generated objects

Step by step

  1. Epitaxial graphene on SiCGraphene grown on the SiC wafer is the growth template
  2. Grow GaNSingle-crystal GaN grows on the graphene, aligned by the substrate
  3. Deposit a Ni stressorA strained nickel film on top drives the release
  4. Tape and peelWith tape on the Ni, the GaN/Ni film releases at the weak graphene interface
  5. Place on a hostStick the film onto the target substrate
  6. Remove tape and NiGaN stays on the host; the graphene/SiC wafer is reused

Strengths

  • The expensive SiC wafer can be reused
  • Clean, precise release at the graphene interface
  • Films move onto flexible or foreign substrates

Limitations

  • Needs high-quality epitaxial graphene
  • The graphene interface limits film quality
  • Extra stressor and tape steps

Uses

  • Transferable and flexible LEDs
  • Heterogeneous integration of semiconductors
  • Freestanding single-crystal membranes

Papers this template follows

  1. Kim et al., “Principle of direct van der Waals epitaxy of single-crystalline films on epitaxial graphene”, Nat. Commun. 2014. doi:10.1038/ncomms5836primary
  2. Kim et al., “Remote epitaxy through graphene enables two-dimensional material-based layer transfer”, Nature 2017. doi:10.1038/nature22053further reading
  3. Emtsev et al., “Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide”, Nat. Mater. 2009. doi:10.1038/nmat2382further reading

Redrawn and simplified after Kim et al., Nat. Commun. 2014 (doi:10.1038/ncomms5836).

How templates are written and checked: editorial guidelines.

Questions

What does the “Graphene on SiC for remote epitaxy and layer transfer” template show?

Epitaxial graphene on SiC can serve as a reusable growth template. A single-crystal GaN film is grown on the graphene, a nickel stressor layer and tape are added, and the film peels off cleanly along the weak graphene interface. It is then placed on any host substrate, while the graphene/SiC wafer goes back for the next growth.

What are the steps shown in “Graphene on SiC for remote epitaxy and layer transfer”?

1. Epitaxial graphene on SiC: Graphene grown on the SiC wafer is the growth template. 2. Grow GaN: Single-crystal GaN grows on the graphene, aligned by the substrate. 3. Deposit a Ni stressor: A strained nickel film on top drives the release. 4. Tape and peel: With tape on the Ni, the GaN/Ni film releases at the weak graphene interface. 5. Place on a host: Stick the film onto the target substrate. 6. Remove tape and Ni: GaN stays on the host; the graphene/SiC wafer is reused.

What are the starting materials and the product?

Starting materials: Epitaxial graphene on a SiC wafer. Product: A single-crystal GaN film on a host substrate of choice, and a reusable graphene/SiC wafer.

Which papers is “Graphene on SiC for remote epitaxy and layer transfer” based on?

Kim et al., “Principle of direct van der Waals epitaxy of single-crystalline films on epitaxial graphene”, Nat. Commun. 2014 (doi:10.1038/ncomms5836); Kim et al., “Remote epitaxy through graphene enables two-dimensional material-based layer transfer”, Nature 2017 (doi:10.1038/nature22053); Emtsev et al., “Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide”, Nat. Mater. 2009 (doi:10.1038/nmat2382).

Can I edit the “Graphene on SiC for remote epitaxy and layer transfer” template?

Yes. Open it in the LabCanvas editor: all 59 layers are editable, including 13 generated objects (structures, plots, equipment) with their own settings. Change the text, colours and layout, then export PNG, TIFF, SVG or PDF.

Do I need an account to use this template?

Not to view it here. To open and edit it, sign in to LabCanvas or create a free account (the free plan keeps one design of each kind). Downloading the figure is part of LabCanvas Pro (US$19 a month or US$199 a year).

remote epitaxyvan der Waals epitaxylayer transferepitaxial grapheneSiCGaNnickel stressortapewafer reuseLEDheterogeneous integration

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